Manuscript Deadline: August 24, 2026
Papers presented at the ASD 2026 meeting may be submitted for publication in the Journal of Vacuum Science and Technology A (JVST A), published by AVS, for the Conference Collection: ASD 2026. The papers will be peer-reviewed. Accepted papers will appear online immediately after proof processing and published in the next open issue of JVST A and placed in the Conference Collection online.
Papers will be reviewed according to criteria set by the JVST and must meet JVST standards for both technical content and written English. All manuscripts are reviewed to the same standards as regular JVST submissions.
Submission Guidelines
Submit your manuscripts to the JVST A journal, chosen for your specific conference, using the journals’ online manuscript submission system, the JVST Peer X-Press site.
- In preparing your article, you should follow the Information for Contributors.
- Authors are encouraged to use the JVST Article Temple (found at the link above).
Note: acceptance to present at the conference does not guarantee the acceptance of the manuscript. To be published in JVST, the manuscript must:
- present original findings, conclusions or analysis that have not been published previously by the authors or others,
- be free of errors and ambiguities,
- support conclusions with data and analysis,
- be written clearly, and
- have high impact in its field, which must be within the scope of topics covered by the journal.
Note: Authors should select “Regular Article” as the type of paper within the conference special issue (not Letter, Shop Note, etc.)
It is very IMPORTANT that authors indicate to which conference the paper is submitted. Online, you will have an opportunity to tell us that your paper is a part of a conference by choosing “Conference/Special Topic” under the article type and then the conference name from a list.
For the initial submission/review process, a single PDF of your manuscript with embedded figures and tables is needed.
Figures appear online in color for free. Prepare illustrations in the final published size, not oversized or undersized.


